WaferSense® ALS2 Vertical

Demo our ALS Technology!
WaferSense is different... See why

The NEW WaferSense ALS2 Vertical is the latest in CyberOptics' family of Auto Leveling System products. ALS2 Vertical is a wireless, wafer-like inclinometer for checking and adjusting the angle of vertical wafer supports.

Please contact CyberOptics Semiconductor for availability at CSsales@cyberoptics.com.

 

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Features

  • Wafer-like form factor optimizes equipment setup.
  • Objective and reproducible level adjustments enhance process uniformity.
  • Wireless measurement reduces equipment maintenance time.
  • Improved equipment setup reduces particles and increases yield.

More Information

ALS2 Vertical Data Sheet ALS2V Theory of Operation
ALS2 Vertical Datasheet - Japanese 450mm ALS2 Vertical Data Sheet